Thermal-Wave Imaging

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Science  15 Oct 1982:
Vol. 218, Issue 4569, pp. 223-228
DOI: 10.1126/science.218.4569.223


Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.