Laser-Induced Chemistry for Microelectronics

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Science  15 Feb 1985:
Vol. 227, Issue 4688, pp. 709-714
DOI: 10.1126/science.227.4688.709


Laser-controlled chemical reactions are being explored for use in all phases of the processing of semiconductor devices. Laser-induced chemical processing can produce submicrometer features without the aid of photolithography. Research is also providing new information on light-excited and light-enhanced interface reactions.