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Can Chip Devices Keep Shrinking?

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Science  13 Dec 1996:
Vol. 274, Issue 5294, pp. 1834-1836
DOI: 10.1126/science.274.5294.1834

Summary

Investigators are working to devise silicon-patterning schemes to produce features far smaller than those etched with today's lithographic systems, as reported in this week's issue. In an upcoming issue, Science will explore the new types of devices made possible by these technologies.