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Design and Fabrication of Topologically Complex, Three-Dimensional Microstructures

Science  26 Jun 1998:
Vol. 280, Issue 5372, pp. 2089-2091
DOI: 10.1126/science.280.5372.2089

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Abstract

Two concepts for use in the fabrication of three-dimensional (3D) microstructures with complex topologies are described. Both routes begin with a two-dimensional (2D) pattern and transform it into a 3D microstructure. The concepts are illustrated by use of soft lithographic techniques to transfer 2D patterns to cylindrical (pseudo-3D) substrates. Subsequent steps—application of uniaxial strain, connection of patterns on intersecting surfaces—transform these patterns into free-standing, 3D, noncylindrically symmetrical microstructures. Microelectrodeposition provides an additive method that strengthens thin metal designs produced by patterning, welds nonconnected structures, and enables the high-strain deformations required in one method to be carried out successfully.

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