Reactions on Semiconductor Surfaces

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Science  29 Jan 1999:
Vol. 283, Issue 5402, pp. 646-647
DOI: 10.1126/science.283.5402.646

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Reactions with semiconductor surfaces are important for many processes such as epitaxial growth, dopant incorporation, and patterning that underlie semiconductor technology. Recent advances in scanning tunneling microscopy techniques have enabled substantial progress in identifying the underlying processes. The studies highlight the importance of an exact knowledge of local structural and electronic environments and their interactions with chemical species. In conjunction with computer simulations, these insights are invaluable for developing future nanotechnological devices.