PerspectiveApplied Physics

Testing the Limits for Resists

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Science  19 Jul 2002:
Vol. 297, Issue 5580, pp. 349-350
DOI: 10.1126/science.1073842

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Summary

Advances in materials chemistry have been crucial to the microelectronics revolution. But to shrink devices further requires knowledge of the resolution limits of existing and new materials. In their Perspective, Reichmanis and Nalamasu highlight the report by Lin et al., who report a versatile technique for obtaining such information at nanometer resolution.