Report

Rapid Vapor Deposition of Highly Conformal Silica Nanolaminates

See allHide authors and affiliations

Science  11 Oct 2002:
Vol. 298, Issue 5592, pp. 402-406
DOI: 10.1126/science.1073552

Log in to view full text

Log in through your institution

Log in through your institution

Subjects

Navigate This Article