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Rapid Vapor Deposition of Highly Conformal Silica Nanolaminates

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Science  11 Oct 2002:
Vol. 298, Issue 5592, pp. 402-406
DOI: 10.1126/science.1073552

Article Information

vol. 298 no. 5592 402-406

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Print ISSN: 
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History: 
  • Received for publication May 2, 2002
  • Accepted for publication September 9, 2002

Author Information

  1. Dennis Hausmann,
  2. Jill Becker,
  3. Shenglong Wang,
  4. Roy G. Gordon*
  1. Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.

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