Etching silicon nanotubes

See allHide authors and affiliations

Science  17 Nov 2017:
Vol. 358, Issue 6365, pp. 883
DOI: 10.1126/science.358.6365.883-a

Silicon nanotowers made using multiple-patterning nanosphere lithography

PHOTO: X. XU ET AL., ACS NANO 11, 10384 (2017)

Arrays of silicon nanotubes have many potential applications, including for solar-energy harvesting, photonics, and biological processes such as drug delivery. Xu et al. show how rounds of etching with polystryrene (PS) nanosphere templates can create periodic arrays of silicon nanotubes with controlled pitch, height, and inner and outer diameters. Close-packed arrays of PS nanospheres were oxygen-plasma–etched to create the initial template for deep reactive-ion etching to make silicon nanorods. The PS nanospheres were then further etched to create templates for depositing nickel rings at the top of the nanorods. After removal of the PS nanospheres, the rings guided the final interior etching to form nanotubes.

ACS Nano 10.1021/acsnano.7b05472 (2017).

Navigate This Article