Image-Formation Technique for Scanning Electron Microscopy and Electron Probe Microanalysis

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Science  20 Feb 1970:
Vol. 167, Issue 3921, pp. 1129-1131
DOI: 10.1126/science.167.3921.1129


A technique is described for topographic images on the scanning electron microscope and the scanning electron probe microanalyzer. In this technique, the brightness of the oscilloscope is modulated by a signal obtained by mixing the signal (from secondary electrons or targets current) with its first derivative. This enhances minor topographic features which are poorly reproduced in the technique.