Ceramic Thin Films: Fabrication and Applications

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Science  02 Mar 1990:
Vol. 247, Issue 4946, pp. 1056-1060
DOI: 10.1126/science.247.4946.1056


Ceramics are a distinct class ofmaterials whose properties range from extreme hardness to unique electrical behavior. New methods of creating thin films of complex oxides and electronic ceramics allow the integration of these properties with semiconductor technology and raise the possibility of a new range of electronic devices.

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