Microfabrication techniques for integrated sensors and microsystems

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Science  29 Nov 1991:
Vol. 254, Issue 5036, pp. 1335-1342
DOI: 10.1126/science.1962192


Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.

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