Device Fabrication by Scanned Probe Oxidation

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Science  08 Dec 1995:
Vol. 270, Issue 5242, pp. 1625
DOI: 10.1126/science.270.5242.1625


Precision Engineering Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. E-mail: john.dagata{at} Imaging by scanning a tiny probe across a surface is a well-established technique for nanometer microscopy; now researchers are using these probes to manipulate matter and create small structures. In his Perspective, Dagata describes “an important milestone” reported in the same issue by Snow and Campbell (p. 1639), in which small oxidized structures were created with a scanning probe microscope.

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