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Block Copolymer Lithography: Periodic Arrays of ~1011 Holes in 1 Square Centimeter

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Science  30 May 1997:
Vol. 276, Issue 5317, pp. 1401-1404
DOI: 10.1126/science.276.5317.1401

Article Information

vol. 276 no. 5317 1401-1404

Print ISSN: 
Online ISSN: 
History: 
  • Received for publication February 3, 1997
  • Accepted for publication April 16, 1997

Author Information

  1. Miri Park,
  2. Christopher Harrison,
  3. Paul M. Chaikin,
  4. Richard A. Register,
  5. Douglas H. Adamson
  1. M. Park, C. Harrison, P. M. Chaikin, Department of Physics, Princeton University, Jadwin Hall, Princeton, NJ 08544, USA.
  2. R. A. Register, Department of Chemical Engineering, Princeton University, Princeton, NJ 08544, USA.
  3. D. H. Adamson, Princeton Materials Institute, Princeton University, Princeton, NJ 08544, USA.

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