PerspectiveDEVICE PHYSICS

In Search of Low-k Dielectrics

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Science  15 Oct 1999:
Vol. 286, Issue 5439, pp. 421-423
DOI: 10.1126/science.286.5439.421

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vol. 286 no. 5439 421-423

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    Author Information

    1. Robert D. Miller*
    1. The author is at IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099, USA. E-mail: rdmiller{at}almaden.ibm.com

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