Report

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

See allHide authors and affiliations

Science  07 Apr 2000:
Vol. 288, Issue 5463, pp. 113-116
DOI: 10.1126/science.288.5463.113

Article Information

vol. 288 no. 5463 113-116

PubMed: 
Print ISSN: 
Online ISSN: 
History: 
  • Received for publication November 24, 1999
  • Accepted for publication February 14, 2000
  • .

Author Information

  1. Marc A. Unger,
  2. Hou-Pu Chou,
  3. Todd Thorsen,
  4. Axel Scherer,
  5. Stephen R. Quake*
  1. Department of Applied Physics, California Institute of Technology, Pasadena, CA 91125, USA.

Altmetric

Article usage

Article usage: April 2000 to February 2020

AbstractFullPdf
Apr 20004111557566
May 200074185118
Jun 20007012473
Jul 20004010355
Aug 2000207152
Sep 2000307240
Oct 2000219464
Nov 20002510971
Dec 2000207463
Jan 20014110691
Feb 20015111886
Mar 20013511870
Apr 20012413578
May 20012011685
Jun 2001368158
Jul 20012410749
Aug 20013710394
Sep 200198166
Oct 2001109869
Nov 20012512893
Dec 2001269468
Jan 20022814286
Feb 20022610477
Mar 20022114385
Apr 200240144103
May 200244174104
Jun 20025214197
Jul 20022013681
Aug 20023311888
Sep 20021684124
Oct 200240108218
Nov 200234112181
Dec 20022069110
Jan 20032888144
Feb 20031873115
Mar 20032487119
Apr 200334105154
May 20032967130
Jun 20032456106
Jul 20033176114
Aug 20031675123
Sep 200336111129
Oct 20034499178
Nov 20034277130
Dec 20032980110
Jan 20041888106
Feb 200460102136
Mar 200455159167
Apr 200461142180
May 200458119139
Jun 20046999115
Jul 200457123100
Aug 200470132127
Sep 200468115130
Oct 200462179148
Nov 200487185141
Dec 200460160145
Jan 200588160164
Feb 200599148117
Mar 200593169143
Apr 200548197134
May 200566149139
Jun 200595153141
Jul 200570113110
Aug 2005106132131
Sep 20057711892
Oct 200598163138
Nov 2005130149138
Dec 200574112133
Jan 20068384128
Feb 20069769121
Mar 200613099157
Apr 2006112115139
May 20069298151
Jun 200610098147
Jul 2006906180
Aug 20068587105
Sep 200610578106
Oct 200612291169
Nov 200611293157
Dec 20068268109
Jan 20079293138
Feb 2007102110158
Mar 200714790164
Apr 2007140102168
May 2007163119190
Jun 2007103113116
Jul 2007145110161
Aug 2007148108111
Sep 200714886154
Oct 200718699169
Nov 2007189112198
Dec 200716393129
Jan 2008176105139
Feb 2008185126147
Mar 2008204123173
Apr 2008227132158
May 2008180103134
Jun 2008206106140
Jul 2008201141123
Aug 200817099114
Sep 2008215146136
Oct 2008246172194
Nov 2008224146150
Dec 2008183109123
Jan 2009214122134
Feb 2009237104146
Mar 2009250159168
Apr 2009235170177
May 2009190159167
Jun 2009194122151
Jul 2009225158174
Aug 2009198116119
Sep 2009235149162
Oct 2009291232156
Nov 2009251202166
Dec 2009184109118
Jan 2010195120125
Feb 2010230126162
Mar 2010280192195
Apr 2010249174144
May 2010256188128
Jun 2010200147122
Jul 2010233130138
Aug 2010250109115
Sep 2010235168133
Oct 2010319175174
Nov 2010344141147
Dec 2010295140125
Jan 2011288159135
Feb 2011231126107
Mar 2011431155160
Apr 2011398141152
May 2011317142142
Jun 201126712199
Jul 2011226107107
Aug 2011219116109
Sep 2011308125117
Oct 2011345156157
Nov 2011339176139
Dec 2011257132154
Jan 201225391136
Feb 2012315132165
Mar 2012344131141
Apr 2012310109123
May 2012384156174
Jun 2012313146124
Jul 20122738488
Aug 20122418596
Sep 201227488127
Oct 2012399133124
Nov 2012379125109
Dec 201225889102
Jan 2013378136130
Feb 20133309896
Mar 2013454137145
Apr 2013393139149
May 2013371170150
Jun 2013353119109
Jul 2013334119444
Aug 2013287115126
Sep 2013295104100
Oct 2013480174140
Nov 2013496131107
Dec 2013374113101
Jan 2014399137113
Feb 2014372137112
Mar 2014444149141
Apr 2014499146151
May 2014419145123
Jun 2014314133132
Jul 2014343149124
Aug 2014311128109
Sep 2014337120117
Oct 2014356183123
Nov 2014398148131
Dec 201430012497
Jan 2015298119132
Feb 201527012583
Mar 2015404137118
Apr 2015294167123
May 2015305132125
Jun 201526412989
Jul 201528212998
Aug 201521811889
Sep 2015323161108
Oct 2015339184124
Nov 2015337153117
Dec 201532011989
Jan 20162708885
Feb 2016335127137
Mar 2016352115160
Apr 2016505160164
May 2016540136143
Jun 2016348125146
Jul 201632581119
Aug 201634293123
Sep 201634785171
Oct 2016434106135
Nov 2016444109147
Dec 2016422110120
Jan 2017344137117
Feb 201734098158
Mar 2017393108187
Apr 2017397112155
May 2017361100126
Jun 2017365116159
Jul 20171029105149
Aug 201742180162
Sep 201731688127
Oct 2017389118140
Nov 2017387122144
Dec 201737868112
Jan 2018660113166
Feb 201873986132
Mar 2018101489157
Apr 2018900114130
May 2018946105137
Jun 2018800101107
Jul 201871095135
Aug 201855314876
Sep 2018429195113
Oct 2018570238151
Nov 2018299288147
Dec 201816217286
Jan 2019166176120
Feb 2019141173107
Mar 2019169218115
Apr 2019182252137
May 201915216092
Jun 201990157110
Jul 2019186175143
Aug 2019196104108
Sep 2019189144122
Oct 2019218150102
Nov 2019227125103
Dec 2019195121119
Jan 202020610386
Feb 2020975331

Stay Connected to Science