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Imaging of Arsenic Cottrell Atmospheres Around Silicon Defects by Three-Dimensional Atom Probe Tomography

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Science  07 Sep 2007:
Vol. 317, Issue 5843, pp. 1370-1374
DOI: 10.1126/science.1145428

Article Information

vol. 317 no. 5843 1370-1374

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Print ISSN: 
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History: 
  • Received for publication May 21, 2007
  • Accepted for publication July 26, 2007
  • .

Author Information

  1. Keith Thompson1,*,
  2. Philip L. Flaitz2,
  3. Paul Ronsheim2,
  4. David J. Larson1,
  5. Thomas F. Kelly1
  1. 1 Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, WI 53711, USA.
  2. 2 IBM Corporation, Hopewell Junction, NY 12533, USA.
  1. * To whom correspondence should be addressed. E-mail: kthompson{at}imago.com

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