Report

Nano–opto-electro-mechanical switches operated at CMOS-level voltages

See allHide authors and affiliations

Science  15 Nov 2019:
Vol. 366, Issue 6467, pp. 860-864
DOI: 10.1126/science.aay8645

Article Information

vol. 366 no. 6467 860-864

PubMed: 
Print ISSN: 
Online ISSN: 
History: 
  • Received for publication August 5, 2019
  • Accepted for publication October 21, 2019
  • .

Author Information

  1. Christian Haffner1,2,3,*,
  2. Andreas Joerg1,
  3. Michael Doderer1,
  4. Felix Mayor1,,
  5. Daniel Chelladurai1,
  6. Yuriy Fedoryshyn1,
  7. Cosmin Ioan Roman4,
  8. Mikael Mazur5,
  9. Maurizio Burla1,
  10. Henri J. Lezec3,
  11. Vladimir A. Aksyuk3,
  12. Juerg Leuthold1
  1. 1Institute of Electromagnetic Fields (IEF), ETH Zurich, 8092 Zurich, Switzerland.
  2. 2Maryland NanoCenter, Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742, USA.
  3. 3Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.
  4. 4Micro- and Nanosystems, ETH Zurich, 8092 Zurich, Switzerland.
  5. 5Photonics Laboratory, Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg, Sweden.
  1. *Corresponding author. Email: christian.haffner{at}nist.gov
  • Present address: Department of Applied Physics and Ginzton Laboratory, Stanford University, 348 Via Pueblo Mall, Stanford, CA 94305, USA.

Altmetric

Article usage

Article usage: November 2019 to February 2021

AbstractFullPdf
Nov 2019906921131443
Dec 2019772481351
Jan 2020378238181
Feb 202023312796
Mar 20202449479
Apr 20202286251
May 20203068874
Jun 20201885052
Jul 20201464252
Aug 20201375741
Sep 20201719561
Oct 20201777146
Nov 202010812682
Dec 202046138122
Jan 202133144103
Feb 20213515763

Stay Connected to Science

Navigate This Article