Supplementary Materials

Nano–opto-electro-mechanical switches operated at CMOS-level voltages

Christian Haffner, Andreas Joerg, Michael Doderer, Felix Mayor, Daniel Chelladurai, Yuriy Fedoryshyn, Cosmin Ioan Roman, Mikael Mazur, Maurizio Burla, Henri J. Lezec, Vladimir A. Aksyuk, Juerg Leuthold

Materials/Methods, Supplementary Text, Tables, Figures, and/or References

Download Supplement
  • Materials and Methods 
  • Supplementary Text
  • Figs. S1 to S10
  • Table S1
  • References